DIRECTORY CD USING [lambda, Number] ; SXCMosBasicRules: CEDAR DEFINITIONS = BEGIN ndifUncSubtrContSpacing: CD.Number = 3 * CD.lambda; -- n-Diffusion/unconnected p-substrate-contact spacing ndifInnWell: CD.Number = 0 * CD.lambda; -- n-Diffusion in n-Well ndifpSubstrCont: CD.Number = 0 * CD.lambda; -- n-Diffusion and p-substrate-contact ndifChanBurContSpacing: CD.Number = 2 * CD.lambda; -- channel/buried-contact spacing ndifBurContChanSpacing: CD.Number = 2 * CD.lambda; -- buried-contact/channel spacing pdifUncnWellSpacing: CD.Number = 3 * CD.lambda; -- p-Diffusion/unconnected n-Well-contact spacing pdifnWellCont: CD.Number = 0 * CD.lambda; -- p-Diffusion and n-Well-contact polUncDifSpacing: CD.Number = 1 * CD.lambda; -- Poly/unconnected Diffusion spacing polDiffUncPolySpacing: CD.Number = 1 * CD.lambda; -- Diffusion/unconnected Poly spacing polOverDiff: CD.Number = 0 * CD.lambda; -- Poly over Diffusion polBuriedExtension: CD.Number = 0 * CD.lambda; -- Insufficient Buried extension over Diffusion metCutViaSpacing: CD.Number = 0 * CD.lambda; -- Cut to Via spacing metCutCutSpacing: CD.Number = 2 * CD.lambda; -- Cut to Cut spacing difSep: CD.Number = 3 * CD.lambda / 2; nDifToWell: CD.Number = 5 * CD.lambda; nDifLayerSep: CD.Number = MAX[difSep, nDifToWell - difSep]; difToPolExtSep: CD.Number = 0; polSep: CD.Number = CD.lambda; metSep: CD.Number = 3 * CD.lambda / 2; m2Sep: CD.Number = 2 * CD.lambda; difToPolSep: CD.Number = difToPolExtSep + polSep; -- not halved! contactWidth: CD.Number = 4 * CD.lambda; END. θSXCMosBasicRules.mesa: Set of Spinifex design rules that may be of interest to the outside world Copyright c 1985 by Xerox Corporation. All rights reserved. Written by Beretta, May 20, 1985 1:48:51 pm PDT Last edited by: gbb July 15, 1985 5:52:10 pm PDT Bowers, September 13, 1985 10:38:34 am PDT ndif layer ndifSpacing: CD.Number = 3 * CD.lambda; -- n-Diffusion spacing ndifWidth: CD.Number = 2 * CD.lambda; -- n-Diffusion width pdif layer pdifSpacing: CD.Number = 3 * CD.lambda; -- p-Diffusion spacing pdifWidth: CD.Number = 2 * CD.lambda; -- p-Diffusion width pol layer polSpacing: CD.Number = 2 * CD.lambda; -- Poly spacing polWidth: CD.Number = 2 * CD.lambda; -- Poly width met layer metSpacing: CD.Number = 3 * CD.lambda; -- Metal spacing metWidth: CD.Number = 3 * CD.lambda; -- Metal width m2 layer m2Spacing: CD.Number = 4 * CD.lambda; -- Metal 2 spacing m2Width: CD.Number = 4 * CD.lambda; -- Metal 2 width These numbers are half of the actual minimum distances we are checking for. Κ»˜šœ`™`Jšœ<™Kšœœœ Ÿ6˜jKšœ œœ Ÿ™:Kšœ œœ Ÿ˜@Kšœœœ Ÿ&˜RKšœœœ Ÿ!˜TKšœœœ Ÿ!˜TL™ Kšœ œœ Ÿ™>Kšœœœ Ÿ1˜aKšœ œœ Ÿ™:Kšœœœ Ÿ!˜KL™ Kšœ œœ Ÿ™6Kšœ œœ Ÿ ™2Kšœœœ Ÿ%˜RKšœœœ Ÿ%˜WKšœ œœ Ÿ˜>Kšœœœ Ÿ/˜^L™ Kšœ œœ Ÿ™7Kšœ œœ Ÿ™3Kšœœœ Ÿ˜BKšœœœ Ÿ˜BL™Kšœ œœ Ÿ™8Kšœ œœ Ÿ™4LšœΟbœ5™KKšœœœ ˜&Kšœ œœ˜&Kšœœ œ˜;Kšœœ ˜Kšœœ œ˜Kšœœœ ˜&Kšœœœ˜!Kšœ œ"ŸΠbcŸ˜@Kšœœœ˜(Lšœ˜——…—ϊ 