_ &s _ 55000; -- nm -- _ &toolingSpec _ Atom.PutPropOnList[NIL, $Diffusion, NEW[CDMEBES.ToolingMaskSpecRec _ ["10", CL, 500, 1000, &s+14000, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Depletion, NEW[CDMEBES.ToolingMaskSpecRec _ ["20", DK, 500, 0, 0, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Enhancement, NEW[CDMEBES.ToolingMaskSpecRec _ ["21", DK, 500, 0, 12000, &s+2000]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Burried, NEW[CDMEBES.ToolingMaskSpecRec _ ["30", DK, 500, 0, 0, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Polysilicon, NEW[CDMEBES.ToolingMaskSpecRec _ ["40", CL, 500, 0, 8000, &s+10000]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Contact, NEW[CDMEBES.ToolingMaskSpecRec _ ["50", DK, 500, -250, &s+16000, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Metal1, NEW[CDMEBES.ToolingMaskSpecRec _ ["60", CL, 500, 250, 14000, &s+6000]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Via, NEW[CDMEBES.ToolingMaskSpecRec _ ["51", DK, 500, 0, &s+2000, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $Metal2, NEW[CDMEBES.ToolingMaskSpecRec _ ["61", CL, 500, 500, 0, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $OxidePad, NEW[CDMEBES.ToolingMaskSpecRec _ ["70", DK, 500, 4000, &s, 0]]]; _ &toolingSpec _ Atom.PutPropOnList[&toolingSpec, $NitridePad, NEW[CDMEBES.ToolingMaskSpecRec _ ["71", DK, 500, 2000, &s-10000, 0]]]; ΚCDMEBESVTIToolingSpec3.cm McCreight, June 20, 1986 7:00:07 pm PDT Last Edited by: Ross September 25, 1986 2:27:24 pm PDT This specification is inspired by "Tooling Specification for 2.0 Micron N-Well CMOS Double Metal Advanced Lithography Design Rules", VTI Document number 02-10001, revision *C, by Wes Erck, 5 June 85. Hereafter this delightful document is designated as Ref 1. Ref 1, page 4, section 6.1, first paragraph. Scribe lines are described as a bidirectional road, with symmetry about the center line. 13 microns is the smallest acceptable "bicycle lane", where the motor traffic lane is to be occupied by a test structure. The sum of bicycle and motor traffic lane must be at least 55 um. Κ5˜šœ™Icode™'K™6—J˜Jšœƒ™ƒJ™šœΠceΟe˜JšΟcΔ™ΔJ™—Jš œ$Οkœ œ œ œ˜{Jšœ> œ œ œ˜zJšœ@ œ œ œ˜†Jšœ< œ œ œ˜xJšœ@ œ œ œ˜†Jšœ< œ œ œ˜‚Jšœ; œ œ œ˜ƒJšœ8 œ œ œ˜zJšœ; œ œ œ˜yJšœ= œ œ œ˜}Jšœ? œ œ œ˜…J˜—…—š ™