CDMEBESVTIToolingSpec2.cm
McCreight, June 20, 1986 7:00:07 pm PDT
Last Edited by: Ross September 25, 1986 1:37:29 pm PDT
This specification is inspired by "Tooling Specification for 2.0 Micron N-Well CMOS Double Metal Advanced Lithography Design Rules", VTI Document number 02-10001, revision *C, by Wes Erck, 5 June 85. Hereafter this delightful document is designated as Ref 1.
← &s ← 55000;
-- nm --
Ref 1, page 4, section 6.1, first paragraph. Scribe lines are described as a bidirectional road, with symmetry about the center line. 13 microns is the smallest acceptable "bicycle lane", where the motor traffic lane is to be occupied by a test structure. The sum of bicycle and motor traffic lane must be at least 55 um.
← &toolingSpec ← Atom.PutPropOnList[NIL, $Diffusion, NEW[CDMEBES.ToolingMaskSpecRec ← ["10", CL, 750, 750, &s+14000, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Depletion, NEW[CDMEBES.ToolingMaskSpecRec ← ["20", DK, 750, 0, 0, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Enhancement, NEW[CDMEBES.ToolingMaskSpecRec ← ["21", DK, 750, 0, 12000, &s+2000]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Burried, NEW[CDMEBES.ToolingMaskSpecRec ← ["30", DK, 750, 0, 0, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Polysilicon, NEW[CDMEBES.ToolingMaskSpecRec ← ["40", CL, 250, 250, 8000, &s+10000]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Contact, NEW[CDMEBES.ToolingMaskSpecRec ← ["50", DK, 250, -250, &s+16000, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Metal1, NEW[CDMEBES.ToolingMaskSpecRec ← ["60", CL, 250, 250, 14000, &s+6000]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Via, NEW[CDMEBES.ToolingMaskSpecRec ← ["51", DK, 750, 0, &s+2000, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $Metal2, NEW[CDMEBES.ToolingMaskSpecRec ← ["61", CL, 250, 500, 0, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $OxidePad, NEW[CDMEBES.ToolingMaskSpecRec ← ["70", DK, 750, 0, &s, 0]]];
← &toolingSpec ← Atom.PutPropOnList[&toolingSpec, $NitridePad, NEW[CDMEBES.ToolingMaskSpecRec ← ["71", DK, 750, 0, &s-10000, 0]]];