<> <> <> CDMEBES ///datools/CDNMos _ %CDMEBES.wDir _ "///mebes/"; _ &tech _ %NMos.nmos; _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESNmPerLambda, val: NEW[CDMEBES.Nm _ 1500]]; _ &maxBloat _ 10000 -- nm -- <<10 um is an upper bound on the greatest distance the "influence" of a drawn object extends beyond itself>> _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESNmMaxBloat, val: NEW[CDMEBES.Nm _ &maxBloat]]; _ %CDProperties.PutTechnologyProp[&tech, $CDMEBESActiveToScribeCenter, NEW[CDMEBES.Nm _ 10000-&maxBloat]]; <> <<>> _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESMaskSetName, val: NIL]; <> _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESAddScribe, val: TRUE]; <> _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESDropInList, val: NIL]; _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESNmDieSizeX, val: NIL]; _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESNmDieSizeY, val: NIL]; _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESNmDieOffsetX, val: NIL]; _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESNmDieOffsetY, val: NIL]; source CDMEBESVTIToolingSpec3.cm _ %CDProperties.PutTechnologyProp[&tech, $CDMEBESToolingSpec, &toolingSpec]; <> <<>> _ &diffusion _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Diffusion, cover: LIST[$DeNotch, NEW[CDMEBES.Nm _ 3500 -- diameter of largest space between diffusions that disappears, nm -- ], NEW[%CDMEBES.CDLayerRec _ [source: %NMos.dif, deltaDiameter: 0 ]]]]]; _ &depletion _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Depletion, cover: LIST[$DeNotch, NEW[CDMEBES.Nm _ 3500 -- diameter of largest space between depletions that disappears, nm -- ], NEW[%CDMEBES.CDLayerRec _ [source: %NMos.imp, deltaDiameter: 0 ]]]]]; _ &enhancement _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Enhancement, cover: LIST[$DeNotch, NEW[CDMEBES.Nm _ 3500 -- diameter of largest space between enhancement regions that disappears, nm -- ], LIST[$Enlarge, NEW[CDMEBES.Nm _ 4000], LIST[$ANDNOT, LIST[$AND, NEW[%CDMEBES.CDLayerRec _ [source: %NMos.dif, deltaDiameter: 0]], NEW[%CDMEBES.CDLayerRec _ [source: %NMos.pol, deltaDiameter: 0]]], LIST[$OR, NEW[%CDMEBES.CDLayerRec _ [source: %NMos.imp, deltaDiameter: 0 ]], NEW[%CDMEBES.CDLayerRec _ [source: %NMos.bur, deltaDiameter: 0 ]]]]]]]]; _ &burried _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Burried, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.bur, deltaDiameter: 0]]]]; _ &polysilicon _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Polysilicon, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.pol, deltaDiameter: 0]]]]; _ &contact _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Contact, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.cut, deltaDiameter: 0]]]]; _ &metal1 _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Metal1, cover: LIST[$DeNotch, NEW[CDMEBES.Nm _ 1000 -- diameter of smallest non-metal1 region that disappears, nm -- ], NEW[%CDMEBES.CDLayerRec _ [source: %NMos.met, deltaDiameter: 0]]]]]; _ &via _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Via, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.cut2, deltaDiameter: 0]]]]; _ &metal2 _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $Metal2, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.met2, deltaDiameter: 0]]]]; _ &oxidePad _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $OxidePad, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.ovg, deltaDiameter: 0 -- nm --]]]]; _ &nitridePad _ NEW[%CDMEBES.DerivationMaskSpecRec _ [maskId: $NitridePad, cover: NEW[%CDMEBES.CDLayerRec _ [source: %NMos.ovg, deltaDiameter: 0 -- nm --]]]]; _ %CDProperties.PutTechnologyProp[onto: &tech, prop: $CDMEBESDerivationSpec, val: LIST[&diffusion, &enhancement, &depletion, &burried, &polysilicon, &contact, &metal1, &via, &metal2, &oxidePad, &nitridePad ]]