; nMOSVTIDrc.rul ; ============================================================================ ; Copyright (C) 1986, 1987 by Xerox Corporation. All rights reserved. ; Written by Mark Ross May 22, 1987 10:50:53 am PDT ; ; The design rules contained herein are proprietary and confidential. Any ; release of these rules without the written consent of Xerox Corporation is prohibited. ; ; Command file for 2 micron design rules. ; Basic design rules (i.e., those common to VTI and Dragon) are contained in this file. ; An advisory set of rules can be found by looking in AdvisoryDrc.rul. ; ; Edit History: ; ; ; ============================================================================ *DESCRIPTION PROGRAM-DIR = /user/csl/ecad/drc16p/ SYSTEM = CIF SCALE = 0.01 MIC RESOLUTION = 0.01 MIC INDISK = in.cif OUTDISK = drcout.cif KEEPDATA = SMART MODE = EXEC NOW SYSOUT = CIF SCALEOUT = 0.25 MIC PRINTFILE = drcout *END ; ============================================================================ ; Specify the input layers coming from the tape. ; ============================================================================ *Input-Layer diff = HD implant = HDI buried = HB poly = HP cont = HC met1 = NM via = HC2 met2 = HM2 *END ; ============================================================================ ; Actual DRC follows: ; ============================================================================ *Operation ; Create all of the right "things" from the mask data AND poly diff trans AND poly cont polcont AND diff cont dcont ; **** Diffusion Rules **** WIDTH diff LT 3 OUTPUT errd1 2 ENC[t] trans diff LT 0.01 & WIDTH trans lt 4.5 OUTPUT errd2 2 EXT[h] diff LT 4.5 OUTPUT errd3 2 EXT[t] implant diff LT 3 OUTPUT errd11 2 ENC trans diff LT 3 OUTPUT errd12 2 ; **** Poly Rules **** WIDTH poly LT 2 OUTPUT errp1 3 EXT[h] poly LT 2.5 OUTPUT errp2 3 ENC[t] trans diff LT 0.01 & ENC[t] trans poly LT 2 OUTPUT errp3 3 EXT[t] poly diff LT 1.5 OUTPUT errp4 3 ; **** Contact Rules **** WIDTH cont LT 3 OUTPUT errc1 4 EXT[h] cont LT 3 OUTPUT errc2 4 ;**************************************************************** ENC[to] cont poly LT 1.5 OUTPUT errc3 4 ENC[to] cont diff LT 1.5 OUTPUT errc4 4 EXT[t] dcont trans LT 1.5 OUTPUT errc5 4 EXT[t] polcont diff LT 3 OUTPUT errc6 4 ENC[to] cont met1 LT 1.5 OUTPUT errc7 4 ; **** Met1 Rules **** WIDTH met1 LT 4.5 OUTPUT err1m1 5 EXT[h] met1 LT 4.5 OUTPUT err1m2 5 ; **** Via Rules **** WIDTH via LT 3 OUTPUT errv1 6 WIDTH[r] via LE 10 gdvia NOT via gdvia bdvia EXT[h] via LT 6 OUTPUT errv2 6 ENC[to] via met1 LT 1.5 OUTPUT errv3 6 ENC[to] via met2 LT 1.5 OUTPUT errv4 6 EXT via poly LT 3 OUTPUT errv5 6 ENC[to] via poly LT 4.5 OUTPUT errv6 6 EXT[to] via dcont LT 3 OUTPUT errv7 6 EXT[to] via polcont LT 4.5 OUTPUT errv8 6 ; **** Met2 Rules **** WIDTH met2 LT 6 OUTPUT err2m1 7 EXT[h] met2 LT 6 OUTPUT err2m2 7 *END