Cholla: A Computer Assisted Silicon ProcessingFacilityOverviewby Douglas K. Brotz and Charles M. GeschkeApril 1980Abstract: Cholla, a system providing computer assistance to the silicon wafer processingfacility at the Integrated Circuit Laboratory of the Xerox Palo Alto Research Center, isdescribed. Brief descriptions of the environment in which the system will be used and of thehardware and software components of the system are given. The goals of the IntegratedCircuit Laboratory supported by Cholla are twofold: 1) to provide a fast turnaround siliconwafer fabrication facility supporting designers of VLSI components, and 2) to support VLSIprocess research. Cholla provides this support, allowing variability in individual waferprocessing, through its management of information associated with VLSI fabrication, precisecontrol of silicon processing equipment, and capture of data associated with suchprocessing.XEROXPalo Alto Research Center3333 Coyote Hill Road / Palo Alto / California 94304î ·ïVŠpqôŸð(î ·ïSî ·ïLzî ·ïG„rôXð*î ·ïBÔsôG î ·ï9Rrô¸ tô¹ðGî ·ï7ôìð0ôíð(î ·ï4èôŠð:ô‹ð#î ·ï2³ô¹ ôºðJî ·ï0~ôµð6ô¶ð%î ·ï.Iô°ðCô±î ·ï,ôýôþðHî ·ï)ßô›ð%ôœð6î ·ï'ªô3ð(ô4ð)î ·ï%u î'öïóuî'ÿï(rôXî'ÿï ÇsôGð4ì · ¤=ÑK¨€ OLDENGLISH HELVETICA HELVETICA  HELVETICA HELVETICA LOGO€ÿÿj/“0Þÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿcholla.titlepageBrotzUnknown