Page Numbers: Noy648qjw(635)
Cholla: A Computer Assisted Silicon Processing Facility

Overviewy648x6w\f8 6f9b
by Douglas K. Brotz and Charles M. Geschkez18697e24w(0,5152)\f6b
April 1980z18697e24w\f7b
Abstract: Cholla, a system providing computer assistance to the silicon wafer processing facility at the Integrated Circuit Laboratory of the Xerox Palo Alto Research Center, is described.  Brief descriptions of the environment in which the system will be used and of the hardware and software components of the system are given.  The goals of the Integrated Circuit Laboratory supported by Cholla are twofold: 1) to provide a fast turnaround silicon wafer fabrication facility supporting designers of VLSI components, and 2) to support VLSI process research.  Cholla provides this support, allowing variability in individual wafer processing, through its management of information associated with VLSI fabrication, precise control of silicon processing equipment, and capture of data associated with such processing.z18697x6e54jw\f6b10B
XEROXz18697l10230y144w(635)\f2 5f7b
Palo Alto Research Center
3333 Coyote Hill Road / Palo Alto / California 94304l10239w(2116)\f6b26f7