[Indigo]<Chipndale>5.2>ebesmask18>CDxCMOSEBES.cm!1

CDxCMOSEBES.cm

last modified by McCreight, November 6, 1984 2:00:41 pm PST

run TerminalIOPackage

run ChipndalePackage

run CDCmosPackage

run CornerStitchingImpl

run TapeOpsImpl

run TapeStreamsImpl

run EBESMaskImpl

← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDxEBESNmPerLambda, val: NEW[INT ← 1000]]

← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDxEBESNmPerEBESPixel, val: NEW[INT ← 250]]

.. the die size

← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDxEBESXNmPerDie, val: NEW[INT ← 8130000]]

← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDxEBESYNmPerDie, val: NEW[INT ← 8090000]]

.. CMOS masks:

thin oxide or diffusion = 10

nwell = 21

pwell = 22

nimp = 23

pimp = 24

buried = 27

poly = 30

cut = 40

metal = 50

glass = 60

cut2 = 70

metal2 = 80

.. the scribe line

← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDxEBESActiveToScribeCenter, val: NEW[INT ← 105000 -- 25 um inside metal 2 ring --]]

← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDxEBESScribeLines, val: LIST[ NEW[%EBESMaskImpl.ScribeRec ← [maskName: "10", dieEdgeToLineCenter: 0, lineWidth: 110000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "27", dieEdgeToLineCenter: 0, lineWidth: 106000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "30", dieEdgeToLineCenter: 54000, lineWidth: 18000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "40", dieEdgeToLineCenter: 0, lineWidth: 106000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "50", dieEdgeToLineCenter: 59000, lineWidth: 20000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "60", dieEdgeToLineCenter: 0, lineWidth: 80000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "70", dieEdgeToLineCenter: 0, lineWidth: 80000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "80", dieEdgeToLineCenter: 75000, lineWidth: 10000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "23", dieEdgeToLineCenter: 0, lineWidth: 106000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "24", dieEdgeToLineCenter: 0, lineWidth: 106000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "21", dieEdgeToLineCenter: 0, lineWidth: 110000 -- nm --]], NEW[%EBESMaskImpl.ScribeRec ← [maskName: "22", dieEdgeToLineCenter: 0, lineWidth: 110000 -- nm --]]]]

.. how rectangles on ChipNDale levels make rectangles on EBES masks

← %CDProperties.PutPropOnLevel[onto: %CMos.nwel, prop: $CDxEBESName, val: LIST[NEW[%EBESMaskImpl.MaskDestRec ← [name: "21", deltaDiameter: -8000 -- nm --]],NEW[%EBESMaskImpl.MaskDestRec ← [name: "22", deltaDiameter: -2000 -- nm --]]]]

← %CDProperties.PutPropOnLevel[onto: %CMos.ndif, prop: $CDxEBESName, val: NEW[%EBESMaskImpl.MaskDestRec ← [name: "10", deltaDiameter: 1000 -- nm --]]]

← %CDProperties.PutPropOnLevel[onto: %CMos.pwelCont, prop: $CDxEBESName, val: LIST[NEW[%EBESMaskImpl.MaskDestRec ← [name: "10", deltaDiameter: 1000 -- nm --]], NEW[%EBESMaskImpl.MaskDestRec ← [name: "23", deltaDiameter: 3000 -- nm --]], NEW[%EBESMaskImpl.MaskDestRec ← [name: "24", deltaDiameter: 3000 -- nm --]]]]

← %CDProperties.PutPropOnLevel[onto: %CMos.pdif, prop: $CDxEBESName, val: LIST[NEW[%EBESMaskImpl.MaskDestRec ← [name: "10", deltaDiameter: 1000 -- nm --]], NEW[%EBESMaskImpl.MaskDestRec ← [name: "23", deltaDiameter: 3000 -- nm --]], NEW[%EBESMaskImpl.MaskDestRec ← [name: "24", deltaDiameter: 3000 -- nm --]]]]

← %CDProperties.PutPropOnLevel[onto: %CMos.nwelCont, prop: $CDxEBESName, val: NEW[%EBESMaskImpl.MaskDestRec ← [name: "10", deltaDiameter: 1000 -- nm --]]]

← %CDProperties.PutPropOnLevel[onto: %CMos.bur, prop: $CDxEBESName, val: "27"]

← %CDProperties.PutPropOnLevel[onto: %CMos.pol, prop: $CDxEBESName, val: "30"]

← %CDProperties.PutPropOnLevel[onto: %CMos.cut, prop: $CDxEBESName, val: "40"]

← %CDProperties.PutPropOnLevel[onto: %CMos.met, prop: $CDxEBESName, val: "50"]

← %CDProperties.PutPropOnLevel[onto: %CMos.cut2, prop: $CDxEBESName, val: "70"]

← %CDProperties.PutPropOnLevel[onto: %CMos.met2, prop: $CDxEBESName, val: "80"]

← %CDProperties.PutPropOnLevel[onto: %CMos.ovg, prop: $CDxEBESName, val: "60"]

.. the name of the mask set (until I figure out how to get it into the design)

← %CDProperties.PutPropOnAtom[$EBESMask, $CDxEBESMaskSetName, "MPC69AD"]