CDMEBESForMPC55.load
last modified by McCreight, September 10, 1985 2:42:35 pm PDT
CDMEBES
← %CDMEBES.stripesPerClump ← 5 -- package default is 10
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESNmPerLambda, val: NEW[INT ← 1000]]
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESNmPerEBESPixel, val: NEW[INT ← 500]]
.. the die size
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESXNmPerDie, val: NEW[INT ← 8130000]]
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESYNmPerDie, val: NEW[INT ← 9145000]]
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESActiveToScribeCenter, val: NEW[INT ← 105000 -- active area 25 um inside metal 2 scribe ring --]]
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESNmMaxBloat, val: NEW[INT ← 10000]]
.. CMOS masks:
thin oxide or diffusion = 10
← &thinOxScribe ← NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 0, width: 55000 -- nm --]]
← &thinOx ← NEW[%CDMEBES.MaskSpecRec ← [name: "10", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.ndif, deltaDiameter: 1000 -- nm --]], NEW[%CDMEBES.CDLayerRec ← [source: %CMos.pdif, deltaDiameter: 1000 -- nm --]], NEW[%CDMEBES.CDLayerRec ← [source: %CMos.pwellCont, deltaDiameter: 1000 -- nm --]], NEW[%CDMEBES.CDLayerRec ← [source: %CMos.nwellCont, deltaDiameter: 1000 -- nm --]], &thinOxScribe]]]
nwell = 21
← &nWell ← NEW[%CDMEBES.MaskSpecRec ← [name: "21", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.nwell, deltaDiameter: -8000 -- nm --]], &thinOxScribe]]]
pwell = 22
← &pWell ← NEW[%CDMEBES.MaskSpecRec ← [name: "22", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.nwell, deltaDiameter: -2000 -- nm --]], &thinOxScribe]]]
nimp = 23
← &impScribe ← NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 0, width: 53000 -- nm --]]
← &ndifs ← LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.ndif]], NEW[%CDMEBES.CDLayerRec ← [source: %CMos.nwellCont]]]
← &pdifs ← LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.pdif]], NEW[%CDMEBES.CDLayerRec ← [source: %CMos.pwellCont]]]
← &nImp ← NEW[%CDMEBES.MaskSpecRec ← [name: "23", cover: LIST[$OR, LIST[$RestrictNImplant, NEW[INT ← 1500 -- maxRadialExtension, nm -- ], &ndifs, &pdifs], &impScribe]]]
pimp = 24
← &pImp ← NEW[%CDMEBES.MaskSpecRec ← [name: "24", cover: LIST[$OR, LIST[$RestrictNImplant, NEW[INT ← 1500 -- maxRadialExtension, nm -- ], &pdifs, &ndifs], &impScribe]]]
nwell = 25
← &vtiNWell ← NEW[%CDMEBES.MaskSpecRec ← [name: "25", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.nwell, deltaDiameter: -3000 -- nm --]], &thinOxScribe]]]
pwell = 26
← &vtiPWell ← NEW[%CDMEBES.MaskSpecRec ← [name: "26", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.nwell, deltaDiameter: 0 -- nm --]], &thinOxScribe]]]
buried = 27
← &buried ← NEW[%CDMEBES.MaskSpecRec ← [name: "27", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.bur, deltaDiameter: 0 -- nm --]], &impScribe]]]
poly = 30
← &poly ← NEW[%CDMEBES.MaskSpecRec ← [name: "30", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.pol, deltaDiameter: 0 -- nm --]], NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 54000, width: 18000 -- nm --]]]]]
cut = 40
← &cut ← NEW[%CDMEBES.MaskSpecRec ← [name: "40", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.cut, deltaDiameter: 0 -- nm --]], &impScribe]]]
metal = 50
← &metal ← NEW[%CDMEBES.MaskSpecRec ← [name: "50", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.met, deltaDiameter: 0 -- nm --]], NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 59000 -- nm --, width: 20000 -- nm --]]]]]
glass = 60
← &glass ← NEW[%CDMEBES.MaskSpecRec ← [name: "60", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.ovg, deltaDiameter: 0 -- nm --]], NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 0, width: 40000 -- nm --]]]]]
cut2 = 70
← &cut2 ← NEW[%CDMEBES.MaskSpecRec ← [name: "70", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.cut2, deltaDiameter: 0 -- nm --]], NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 0, width: 40000 -- nm --]]]]]
metal2 = 80
← &metal2 ← NEW[%CDMEBES.MaskSpecRec ← [name: "80", cover: LIST[$OR, NEW[%CDMEBES.CDLayerRec ← [source: %CMos.met2, deltaDiameter: 0 -- nm --]], NEW[%CDMEBES.ScribeRec ← [scribeCenterToOuterEdge: 75000 -- nm --, width: 10000 -- nm --]]]]]
← %CDProperties.PutPropOnTechnology[onto: %CMos.cmos, prop: $CDMEBESMaskSetSpec, val: LIST[&thinOx, &nWell, &pWell, &nImp, &pImp, &vtiNWell, &vtiPWell, -- &buried, -- &poly, &cut, &metal, &glass, &cut2, &metal2]]
.. the name of the die (until I figure out how to get it into the design)
← %CDProperties.PutPropOnAtom[$MEBESMask, $CDMEBESMaskSetName, "MPCxxZZ"]