! WET GATE OXIDE   800C  WET OXIDATION
! Target: 210  20
! Filed : WGOX210.R

Tube: 2

Recipe:

 00:10:00 D	Push		800C  Ar @ 9.0 l/m + O2 @ 0.2 l/m Push @ 7"/min
 00:05:00 W	Soak		800C		Ar @ 5.0 l/m + O2 @ 0.2 l/m
 00:30:00 W	Wet		800C		O2 @ 4.0 l/m + H2 @ 8.0 l/m
 00:30:00 D	Anneal	800C		Ar @ 5.0 l/m 
 00:05:00 D	Cool		800C		Ar @ 5.0 l/m 
 00:20:00 D	Pull		800C		Ar @ 9.0 l/m   Pull @ 5"/min