! PHOSPHORUS DIFFUSION @  900C  
! Target: 20 ohm/squar on single crystal
! Filed : POCL320.R

Tube: 5

Recipe:

 00:10:00 D	Push		900C	O2 @ 1.0 l/m + N2 @ 5.0 l/m  Push @ 7"/min
 00:05:00 D	Soak		900C		O2 @ 1.0 l/m + N2 @ 5.0 l/m
 00:20:00 D	POCL 	900C		O2 @ 0.4 l/m + POCL3 @ 150 cc/m + N2 @ 5.0 l/m
 00:10:00 D    Purge		900C		O2 @ 1.0 l/m + N2 @ 5.0 l/m
 00:20:00 D	Pull		900C	O2 @ 1.0 l/m + N2 @ 5.0 l/m Pull @ 5"/min