! IMPLANT ANNEAL  @ 900C  IN ARGON GAS
! Target: Ar @ 950C 30 minutes.
! Filed : IA950.R

Tube: 1

Recipe:

 00:10:00 D	Push		800C 	Ar @ 9.0 l/m  Push @ 7"/min
 00:15:00 D	RampUp	950C		Ar @ 5.0 l/m  
 00:30:00 D	Anneal	950C		Ar @ 5.0 l/m 
 00:15:00 D	RampDown	800C		Ar @ 5.0 l/m 
 00:05:00 D	Cool		800C		Ar @ 5.0 l/m 
 00:20:00 D	Pull		800C		Ar @ 9.0 l/m   Pull @ 5"/min