! IMPLANT ANNEAL @ 900C IN ARGON GAS ! Target: Ar @ 900C 30 minutes. ! Filed : IA900.R Tube: 1 Recipe: 00:10:00 D Push 800C Ar @ 9.0 l/m Push @ 7"/min 00:10:00 D RampUp 900C Ar @ 5.0 l/m 00:30:00 D Anneal 900C Ar @ 5.0 l/m 00:15:00 D RampDown 800C Ar @ 5.0 l/m 00:05:00 D Cool 800C Ar @ 5.0 l/m 00:20:00 D Pull 800C Ar @ 9.0 l/m Pull @ 5"/min