! FIELD OXIDE 900C WET OXIDATION ! Target: 10,000 500 ! Filed : FOX10.R Tube: 4 Recipe: 00:10:00 D Push 800C Ar @ 9.0 l/m + O2 @ 0.2 l/m Push @ 7"/min 00:10:00 W RampUp 900C Ar @ 5.0 l/m + O2 @ 0.2 l/m 00:05:00 W Soak 900C Ar @ 5.0 l/m + O2 @ 0.2 l/m 13:20:00 W Wet 900C O2 @ 4.0 l/m + H2 @ 8.0 l/m 00:30:00 D Anneal 900C Ar @ 5.0 l/m 00:15:00 D RampDown 800C Ar @ 5.0 l/m 00:05:00 D Cool 800C Ar @ 5.0 l/m 00:20:00 D Pull 800C Ar @ 9.0 l/m Pull @ 5"/min