EGlas.mesa
Copyright © 1985 by Xerox Corporation. All rights reserved.
Barth, September 16, 1985 6:44:03 pm PDT
Last Edited by: Gasbarro September 24, 1985 11:48:06 am PDT
EGlas: CEDAR DEFINITIONS = BEGIN
OverDrive: TYPE = [1..7];
Init:
PROCEDURE;
Sets up parameters for RS232 communication link to the ElectroGlas. Must be executed before any other command is issued.
Load:
PROCEDURE;
Load and/or Unload wafer and proceed to align after wafer transfer.
ZUp:
PROCEDURE;
Raise chuck to Z contact plus selected overdrive number
ZDown:
PROCEDURE;
Lower chuck to reference position
TestStart:
PROCEDURE;
Send tester Tester Start Pulse
Seek:
PROCEDURE [x, y:
REAL];
Move chuck to specified device coordinates
GetDeviceCoordinates:
PROCEDURE []
RETURNS [x, y:
REAL];
Returns current position of chuck in Device Coordinates
SetDeviceCoordinates:
PROCEDURE [x, y:
REAL];
Define current chuck position as Device Coordinate [x, y]
SetDieSize:
PROCEDURE [x, y:
REAL];
Define Die Size
SetOverDrive:
PROCEDURE [overdrive: OverDrive];
Set chuck overdrive after Z closure (mils)
LampOn:
PROCEDURE [];
Turns microscope and camera lamps on
LampOff:
PROCEDURE [];
Turns microscope and camera lamps off
ManualMode:
PROCEDURE [];
Enables manual control of prober (theta, z, joystick, vacuum, align, probe switches). Press Start switch to return to automatic control.
END.