[_CD4_]<datools7.0>CDMEBES25>CDMEBESDropInImpl.mesa!3

CDMEBESDropInImpl.mesa

written by E. McCreight, November 2, 1983 6:03 pm

McCreight, May 1, 1987 6:38:41 pm PDT

Last Edited by: McCreight November 23, 1987 6:29:08 pm PST

This module drops a MEBES file into another MEBES file, one stripe at a time.

DIRECTORY

Atom, Basics, BasicTime, CDBasics, CDMEBES, CDMEBESScan, CStitching, FS, IO, Process, Rope;

CDMEBESDropInImpl: CEDAR PROGRAM IMPORTS Atom, Basics, BasicTime, CDBasics, CDMEBES, CDMEBESScan, CStitching, FS, IO, Process, Rope EXPORTS CDMEBES =

BEGIN OPEN CDMEBES;

InsertDropIn: PUBLIC PROC [ ms: MaskState, rects: Tesselation, di: DropIn, data: REF ] RETURNS [ newData: REF ] =

This procedure incorporates the mask information referenced in data, translated by di.pos and then clipped to ms.mebesStripeClip, into the MEBES stream in ms.s.

BEGIN

IF data = NIL THEN

data ←IO.PutFR[di.fileNamePattern, IO.rope[NARROW[ms.toolingSpec.GetPropFromList[ms.curMask.maskId], ToolingMaskSpec].maskNo]];

IF data = NIL THEN RETURN[NIL];

WITH data SELECT FROM

fileName: Rope.ROPE => {

tries: INT ← 0;

{ ENABLE FS.Error =>

SELECT error.code FROM

$connectionTimedOut, $connectionRejected =>

IF tries < 10 THEN {

tries ← tries+1;

Process.PauseMsec[10000];

RETRY;

}

ELSE REJECT;

ENDCASE => REJECT;

fileLen: INT ← -2;

did: REF ANY;

[bytes: fileLen] ← FS.FileInfo[fileName];

SELECT fileLen FROM

>= 2048 => did ← CDMEBESScan.ScanMebesPatternFile[fileName];

<= 0 => ERROR;

ENDCASE => {

s: IO.STREAM ← FS.StreamOpen[fileName];

token: Rope.ROPE ← IO.GetCedarTokenRope[s].token;

s.Close[];

IF Rope.Equal[token, "EmptyMebesPatternFile"] THEN did ← $NoInsert

ELSE ERROR;

};

newData ← InsertDropIn[ms, rects, di, did];

};

atom: ATOM => newData ← atom; -- don't actually DO anything

did: CDMEBESScan.DropInDescriptor => {

scaleNtoM: Rational = [num: 1, denom: ms.mebesPixelPitch]; -- from Nm to MEBESPixels

scaleMtoT: Rational = [num: ms.mebesPixelPitch*ms.tadsPerNm, denom: 1]; -- from MEBESPixels to Tads

mebesStripeClip: MEBESRect = ScaleRect[ms.tadStripeClip, [num: 1, denom: ms.mebesPixelPitch*ms.tadsPerNm]];

dropInClip: MEBESRect; -- the current output stripe, translated to drop-in space and clipped to drop-in boundary

dropInOffsetToReticleClip: MEBESPosition; -- position of drop-in file's [0,0] in reticleClip

mebesStripeClipFromDropIn: MEBESRect;

IF BasicTime.Period[did.lastChecked, BasicTime.Now[]] > 5*60 THEN {

WHILE FS.FileInfo[did.fileName].created # did.created DO

did ← CDMEBESScan.ScanMebesPatternFile[did.fileName]; -- needs updating

ENDLOOP;

did.lastChecked ← BasicTime.Now[];

};

IF ms.mebesPixelPitch -- nm -- *1.0E-9 > did.pixelSize -- Meters -- +5.0E-10 OR

ms.mebesPixelPitch*1.0E-9 < did.pixelSize-5.0E-10 THEN

ERROR; -- pixel sizes incompatible

dropInOffsetToReticleClip ← ScalePoint[CDBasics.AddPoints[CDBasics.AddPoints[di.pos, ms.dieOffset], CDBasics.BaseOfRect[ms.nmReticleClip]], scaleNtoM];

mebesStripeClipFromDropIn ← CDBasics.MoveRect[mebesStripeClip,

CDBasics.NegOffset[dropInOffsetToReticleClip]];

dropInClip ← CDBasics.Intersection[did.clip, mebesStripeClipFromDropIn];

IF CDBasics.NonEmpty[dropInClip] THEN {

s: IO.STREAM;

IF di.clearBackground THEN

rects.ChangeRect[

ScaleRect[CDBasics.MoveRect[dropInClip, dropInOffsetToReticleClip], scaleMtoT],

NIL];

FOR segment: CARDINAL ← dropInClip.x1/CDMEBES.maskWidth+segmentOrigin, segment+1 WHILE (segment-segmentOrigin)*CDMEBES.maskWidth < dropInClip.x2 DO

FOR stripe: CARDINAL ← dropInClip.y1/did.stripeHeight+stripeOrigin, stripe+1 WHILE (stripe-stripeOrigin)*did.stripeHeight <= dropInClip.y2 DO

offset: MEBESPosition = [x: (segment-segmentOrigin)*CDMEBES.maskWidth, y: (stripe-stripeOrigin)*did.stripeHeight];

IF did[segment][stripe] = [0, 0] THEN LOOP;

IF s = NIL THEN

s ← FS.StreamOpen[fileName: did.fileName, remoteCheck: FALSE];

s.SetIndex[CDMEBES.mebesBlockSize*(did[segment][stripe].firstBlock-1)+2*(did[segment][stripe].firstWordWithinBlock-1)];

ProcessStripe[source: s, dest: ms.s,

stripeClip: CDBasics.Intersection[

[x1: 0, y1: 0, x2: CDMEBES.maskWidth, y2: did.stripeHeight],

CDBasics.MoveRect[r: dropInClip, offset: CDBasics.NegOffset[offset]]

destTrans: CDBasics.AddPoints[offset, CDBasics.SubPoints[dropInOffsetToReticleClip, CDBasics.BaseOfRect[mebesStripeClip]]]

];

ENDLOOP; -- stripe

ENDLOOP; -- segment

s.Close[]; s ← NIL;

};

newData ← did;

};

ENDCASE => ERROR;

END;

rectCmd: REF DrawRectangle ← NEW[DrawRectangle];

trapCmd: REF DrawTrapezoid ← NEW[DrawTrapezoid];

ProcessStripe: PROC [ source, dest: IO.STREAM, stripeClip: MEBESRect, destTrans: MEBESPosition ] =

BEGIN

In this section, intervals are always closed on the left and open on the right, thus: [z1..z2).

MEBES16Pixels: TYPE = MEBESPixels; -- sixteenths of a MEBESPixel

According to a conversation with Perkin-Elmer, a pixel is turned on if and only if its integer is included in the 1/16-resolution range. For example, [3.5..5.25) turns on pixels 4 and 5.

InsertRectangle: PROC [ x, y, width, height: MEBESPixels ] = {

destRect: MEBESRect = CDBasics.Intersection[stripeClip, [x1: x, y1: y, x2: x+width, y2: y+height]];

IF CDBasics.NonEmpty[destRect] THEN {

rectCmd.h ← destRect.y2-destRect.y1;

rectCmd.w ← destRect.x2-destRect.x1;

rectCmd.x ← destRect.x1+destTrans.x;

rectCmd.y ← destRect.y1+destTrans.y;

SendCommand[dest, rectCmd];

};

InsertTrapezoid: PROC [ x, width: MEBES16Pixels, y, height: MEBESPixels, leftEdge, rightEdge: MEBES16Pixels ] = {

A conversation with Keith Wires of MicroFab (415-965-1750) on 20 November 86 leads me (EMM) to the following statement of the Perkin-Elmer core pixel fill algorithm. A pixel (x, y) is turned on if and only if its center point (x+0.4999.., y+0.4999..) lies within the plotted figure. If that's true, the trapezoid scan conversion algorithm used by Perkin-Elmer can be represented like this:

FOR dy: INT ← 1, dy+2 WHILE dy<2*height DO -- halves

x1: INT = x+((dy*leftEdge)/(2*height))); -- sixteenths

.. the left boundary at y-center of pixel row

x2: INT = x+width+((dy*rightEdge)/(2*height))); -- sixteenths

.. the right boundary at y-center of pixel row

x1Frac: INT = x1 MOD 16; -- sixteenths

FOR px: INT ← x1-x1Frac+(IF x1Frac<8 THEN 0 ELSE 16), px+16 WHILE px < x2 DO

FillPixelRectangle[x1: (px-8)/16, y1: y+(dy-1)/2, x2: (px+8)/16, y: y+(dy+1)/2];

ENDLOOP;

x1b, x1t, x2b, x2t: MEBES16Pixels;

y1, y2: MEBESPixels;

sx1: MEBES16Pixels = 16*stripeClip.x1;

sx2: MEBES16Pixels = 16*stripeClip.x2;

Low: PROC [ i: INT ] RETURNS [ n: CARDINAL ] =

{RETURN[Basics.LowHalf[LOOPHOLE[i]]]};

High: PROC [ i: INT ] RETURNS [ n: [0..100B) ] =

BEGIN

hi: INTEGER;

TRUSTED {hi ← LOOPHOLE[Basics.HighHalf[i]]};

IF ~ (hi IN [-40B..40B) ) THEN ERROR;

RETURN[IF hi>=0 THEN hi ELSE hi+100B];

END;

Interpolate: PROC [ b1, b2, a1, ax, a2: INT ] RETURNS [ bx: INT ] = {

bx ← b1+((ax-a1)*(b2-b1))/(a2-a1);

};

BasicTrapezoid: PROC [ym1, ym2: MEBESPixels] = {

DoYSplit: PROC [ xb, xm, xt: MEBES16Pixels ] = {

ySplit: MEBESPixels = MAX[ym1+1, MIN[ym2-1, Interpolate[y1, y2, xb, xm, xt]]];

BasicTrapezoid[ym1, ySplit];

BasicTrapezoid[ySplit, ym2];

};

SELECT TRUE FROM

ym2 <= ym1 => RETURN; -- empty clipping region [ym1..ym2)

ym1 = ym2-1 => { -- a single row of pixels, approximate with rectangle

xm1: MEBESPixels ← Interpolate[x1b, x1t, y1, ym1, y2]/16;

xm2: MEBESPixels ← Interpolate[x2b, x2t, y1, ym1, y2]/16;

IF xm1 < xm2 THEN

InsertRectangle[xm1, ym1, xm2-xm1, 1];

};

ENDCASE => {

xm1b: MEBES16Pixels ← Interpolate[x1b, x1t, y1, ym1, y2];

xm2b: MEBES16Pixels ← Interpolate[x2b, x2t, y1, ym1, y2];

xm1t: MEBES16Pixels ← Interpolate[x1b, x1t, y1, ym2, y2];

xm2t: MEBES16Pixels ← Interpolate[x2b, x2t, y1, ym2, y2];

IF xm2b < xm1b OR xm2t < xm1t THEN ERROR;

SELECT TRUE FROM

Examine the left boundary of the trapezoid within the y-range.

xm1b < sx1+8 AND xm1t < sx1+8 =>

xm1b ← xm1t ← sx1;

.. both top and bottom of the trapezoid include the pixel stripeClip.x1

xm1b < sx1-8 OR xm1t < sx1-8 => {

Find the value of y where the [x1b, y1] - [x1t, y2] edge crosses the line x=stripeClip.x1, and output two trapezoids.

DoYSplit[x1b, sx1, x1t];

RETURN;

};

.. at this point, we know the [x1b, y1] - [x1t, y2] lies to the right of x=stripeClip.x1. Now check its relation to x=stripeClip.x2.

xm1b < sx2+8 AND xm1t < sx2+8 => NULL;

.. no pixel off beyond stripeClip.x2

xm1b < sx2-8 OR xm1t < sx2-8 => {

Find the value of y where the [x1b, y1] - [x1t, y2] edge crosses the line x=stripeClip.x2+0.5, and output two trapezoids.

DoYSplit[x1b, sx2, x1t];

RETURN;

};

ENDCASE => RETURN;

.. clips out to the right

SELECT TRUE FROM

Examine the right boundary of the trapezoid within the y-range.

sx2-8 <= xm2b AND sx2-8 <= xm2t => {

.. both top and bottom of the trapezoid include the rightmost pixel

xm2b ← MIN[MAX[xm1b+1, xm2b], sx2];

xm2t ← MIN[xm2t, sx2];

};

sx2+8 <= xm2b OR sx2+8 <= xm2t => {

Find the value of y where the [x2b, y1] - [x2t, y2] edge crosses the line x=stripeClip.x2, and output two trapezoids.

DoYSplit[x2b, sx2, x2t];

RETURN;

};

.. at this point, we know the [x2b, y1] - [x2t, y2] lies to the left of x=stripeClip.x2. Now check its relation to x=stripeClip.x1.

sx1-8 <= xm2b AND sx1-8 <= xm2t => {

.. no pixel off beyond stripeClip.x1

xm2b ← MAX[sx1, xm1b+1, xm2b];

xm2t ← MAX[sx1, xm1b+1, xm2t];

};

sx1+8 <= xm2b OR sx1+8 <= xm2t => {

Find the value of y where the [x2b, y1] - [x2t, y2] edge crosses the line x=stripeClip.x1, and output two trapezoids.

DoYSplit[x2b, sx1, x2t];

RETURN;

};

ENDCASE => RETURN;

.. clips out to the left

At this point we have a trapezoid clipped x entirely within [sx1..sx2) for y in [ym1..ym2).

IF xm2b <= xm1b -- width <= 0

OR xm2t < xm1t -- width < (dx1-dx2)

OR xm1b < sx1

OR xm1t < sx1

OR sx2 < xm2b

OR sx2 < xm2t THEN ERROR; -- just checking...

trapCmd^ ← [

h: ym2-ym1,

wLow: Low[xm2b-xm1b],

x1Low: Low[xm1b+16*destTrans.x],

deltaX2High: High[xm2t-xm2b],

y1: ym1+destTrans.y,

deltaX1Low: Low[xm1t-xm1b],

deltaX2Low: Low[xm2t-xm2b],

deltaX1High: High[xm1t-xm1b],

x1High: High[xm1b+16*destTrans.x],

wHigh: High[xm2b-xm1b]

];

SendCommand[dest, trapCmd];

};

}; -- end of BasicTrapezoid

We have a trapezoid in the source file whose corners are

[x/16, y], [(x+leftEdge)/16, y+height], [(x+width+rightEdge)/16, y+height], [(x+width)/16, y] in clockwise order.

IF (width<0 OR height<0 OR width+rightEdge<leftEdge) THEN ERROR;

trapezoid not in canonical form

x1b ← x;

x1t ← x+leftEdge;

x2b ← x+width;

x2t ← x+width+rightEdge;

y1 ← y;

y2 ← y+height;

BasicTrapezoid[MAX[y1, stripeClip.y1], MIN[y2, stripeClip.y2]];

};

t1: CARDINAL ← CDMEBESScan.ReadMebesWord[source];

SELECT t1 MOD 100B FROM

16 => { -- Manhattan Rectangle

x, width, y, height: INT;

height ← t1/100B + 1;

width ← CDMEBESScan.ReadMebesWord[source];

x ← CDMEBESScan.ReadMebesWord[source];

y ← CDMEBESScan.ReadMebesWord[source];

InsertRectangle[x, y, width, height];

};

17 => { -- Parallelogram

tmp1, x, width, leftEdge, y, height: INT;

height ← t1/100B + 1;

width ← CDMEBESScan.ReadMebesWord[source];

x ← CDMEBESScan.ReadMebesWord[source];

y ← CDMEBESScan.ReadMebesWord[source];

leftEdge ← CDMEBESScan.ReadMebesWord[source];

tmp1 ← CDMEBESScan.ReadMebesWord[source];

width ← width + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

x ← x + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

leftEdge ←

leftEdge + (tmp1 MOD 100B)*200000B -

(IF tmp1/40B # 0 THEN 20000000B ELSE 0);

InsertTrapezoid[x, width, y, height, leftEdge, leftEdge];

};

18 => { -- Trapezoid 1

tmp1, x, width, leftEdge, y, height: INT;

height ← t1/100B + 1;

width ← CDMEBESScan.ReadMebesWord[source];

x ← CDMEBESScan.ReadMebesWord[source];

y ← CDMEBESScan.ReadMebesWord[source];

leftEdge ← CDMEBESScan.ReadMebesWord[source];

tmp1 ← CDMEBESScan.ReadMebesWord[source];

width ← width + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

x ← x + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

leftEdge ←

leftEdge + (tmp1 MOD 100B)*200000B -

(IF tmp1/40B # 0 THEN 20000000B ELSE 0);

InsertTrapezoid[x, width, y, height, leftEdge, 0];

};

19 => { -- Trapezoid 2

tmp1, x, width, rightEdge, y, height: INT;

height ← t1/100B + 1;

width ← CDMEBESScan.ReadMebesWord[source];

x ← CDMEBESScan.ReadMebesWord[source];

y ← CDMEBESScan.ReadMebesWord[source];

rightEdge ← CDMEBESScan.ReadMebesWord[source];

tmp1 ← CDMEBESScan.ReadMebesWord[source];

width ← width + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

x ← x + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

rightEdge ←

rightEdge + (tmp1 MOD 100B)*200000B -

(IF tmp1/40B # 0 THEN 20000000B ELSE 0);

InsertTrapezoid[x, width, y, height, 0, rightEdge];

};

20 => { -- Trapezoid 3

tmp1, x, width, leftEdge, rightEdge, y, height: INT;

height ← t1/100B + 1;

width ← CDMEBESScan.ReadMebesWord[source];

x ← CDMEBESScan.ReadMebesWord[source];

y ← CDMEBESScan.ReadMebesWord[source];

leftEdge ← CDMEBESScan.ReadMebesWord[source];

rightEdge ← CDMEBESScan.ReadMebesWord[source];

tmp1 ← CDMEBESScan.ReadMebesWord[source];

width ← width + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

x ← x + (tmp1 MOD 40B)*200000B;

tmp1 ← tmp1/40B;

leftEdge ←

leftEdge + (tmp1 MOD 100B)*200000B -

(IF tmp1/40B # 0 THEN 20000000B ELSE 0);

tmp1 ← y/2000B;

y ← y MOD 2000B;

rightEdge ←

rightEdge + (tmp1 MOD 100B)*200000B -

(IF tmp1/40B # 0 THEN 20000000B ELSE 0);

InsertTrapezoid[x, width, y, height, leftEdge, rightEdge];

};

10, 7 => NULL; -- start of segment or small stripe number

2 => [] ← CDMEBESScan.ReadMebesWord[source]; -- start of large stripe number

8 => RETURN; -- end of stripe

4 => RETURN; -- end of drawing

9 => { -- end of buffer

i: INT = source.GetIndex[]+CDMEBES.mebesBlockSize-1;

source.SetIndex[i - (i MOD CDMEBES.mebesBlockSize)];

};

ENDCASE => ERROR CDMEBESScan.NotMEBESFormat;

ENDLOOP;

END;

warnIfUnimplGeom: BOOL ← TRUE;

UnimplementedGeom: PROC =

{IF warnIfUnimplGeom THEN SIGNAL UnImplementedGeometry};

UnImplementedGeometry: SIGNAL = CODE;

Module START code...

END. -- of CDMEBESDropInImpl